Diederik Depla,Stijn Mahieu: Reactive Sputter Deposition

Reactive Sputter Deposition



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Author: Diederik Depla,Stijn Mahieu
Number of Pages: 572 pages
Published Date: 25 Nov 2010
Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Publication Country: Berlin, Germany
Language: English
ISBN: 9783642095368
Download Link: Click Here
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